Highly Sensitive Hydrogen Detection Using a Pt-Catalyzed InN Epilayer
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概要
- 論文の詳細を見る
The current response to hydrogen for a biased ultrathin (${\sim}10$ nm) In-polar indium nitride (InN) epilayer with a catalytic Pt film on top has been investigated. The Pt--InN sensor shows a high current variation ratio of ${\sim}400$% with response/recovery times of less than 1 min while exposed to 2000 ppm H2/air at 150 °C. Even at room temperature, a current variation ratio of 81% was observed under the same gas environment. At 125 °C, the detection limit was experimentally found to be less than 5 ppm. In comparison with a bare InN sensor, the Pt catalyst enhances the current variation by 375 times at 2000 ppm H2/air.
- Japan Society of Applied Physicsの論文
- 2010-11-25
著者
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Gwo Shangjr
Institute Of Nanoengineering And Microsystems National Tsing Hua University
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Chang Kai-kuen
Department Of Physics National Tsing Hua University
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Chang Yuh-hwa
Institute Of Nanoengineering And Microsystems National Tsing Hua University
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Yeh J.
Institute of Nanoengineering and Microsystems, National Tsing Hua University, Hsinchu, Taiwan 30013,
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Yeh J.
Institute Of Nanoengineering And Microsystems National Tsing Hua University
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