Electrical and Mechanical Characteristics of Au-, Pt-, and Pd-Doped Carbon Thin Films

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概要

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• To achieve conductive and wear-durable carbon thin films by metal doping, we deposited Au-, Pt-, and Pd-doped carbon thin films by RF sputtering, and evaluated the dopant concentrations, resistivity, and scratch hardness. Among the doped films, the Pt-doped film with low Pt concentration was most suitable from a practical perspective.

• 2010-04-01

著者

• HIRONO Shigeru

  NTT Afty Engineering Corporation

• Hirono Shigeru

  Mes Afty Corp. Tokyo Jpn

• Hirono Shigeru

  エム・イー・エス・アフティ株式会社

• YABE Mitsunori

  NIHON AUTOMOBILE COLLEGE

• UMEMURA Shigeru

  Chiba Institute of Technology

• YABE Mitsunori

  日本自動車大学校

• UMEMURA Shigeru

  千葉工業大学

関連論文

• A Field-Effect Transistor with a Deposited Graphite Thin Film
• Electrical and Mechanical Characteristics of Au-, Pt-, and Pd-Doped Carbon Thin Films
• Deposition of Pt- and Co-doped carbon thin films and their electrical and mechanical characteristics
• Annealing-Induced Modification of Superhard Conductive Carbon Film
• Nanometer-Scale Recording on a Superhard and Conductive Carbon Film Using an Atomic Force Microscope
• Electrical and Mechanical Characteristics of Co-Doped and Ni-Doped Carbon Thin Films
• Electrical and Tribological Characteristics of Metal-Doped Carbon Thin Films(Materials,Recent Development of Electromechanical Devices (Selected Papers from ICEC2006))
• An sp^2 and sp^3 Hybrid Nanocrystalline Carbon Film Electrode for Anodic Stripping Voltammetry and Its Application for Electrochemical Immunoassay
• Electron Cyclotron Resonance-Sputtered Nanocarbon Film Electrode Compared with Diamond-Like Carbon and Glassy Carbon Electrodes as Regards Electrochemical Properties and Biomolecule Adsorption
• FOREWORD

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