Electrical characteristics of the hybrid plasma of 195kHz-burst RF plasma with arc-free HPPS glow plasma in reactive gases
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概要
- 論文の詳細を見る
- 2008-01-26
著者
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Azuma Kingo
University Of Hyogo
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Yukimura Ken
Doshisha University
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Okimoto Tadao
(kobe Steel Ltd)
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Tamagaki Hiroshi
(kobe Steel Ltd)
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MIEDA Ryosuke
Doshisha University
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- Electrical characteristics of the hybrid plasma of 195kHz-burst RF plasma with arc-free HPPS glow plasma in reactive gases