極低温環境における原子分解能非接触原子間力顕微鏡計測技術

概要

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Noncontact atomic force microscopy (NC-AFM) using frequency modulation detection method has been widely used to investigate the various surfaces with atomic resolution. In this paper, we introduce the measurement technique of NC-AFM operating at low temperatures (LTs). First, we theoretically discuss the enhancement of the force sensitivity in NC-AFM operating at LTs. Then, we present the design and performance of LT-NC-AFM using fiber optic interferometer with quick sample and cantilever exchange mechanism. We also show the present status of the LT-NC-AFM imaging. In detail, we show the experimental results to investigate the influence of the surface stress around an SA step of Si(001) surface onto the buckled dimer at 5 K. We demonstrate that the LT-NC-AFM has a capability to detect the surface stress with atomic resolution.
日本真空協会の論文
2008-12-20