Properties of Methyl Boron Nitride Film for Next Generation Low-K Interconnection

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概要

論文の詳細を見る
2007-09-19

著者

MAZUMDER M.
Dept. of Electrical, Electronic and Information Engineering, Osaka University
KIMURA C.
Dept. of Electrical, Electronic and Information Engineering, Osaka University
AOKI H.
Dept. of Electrical, Electronic and Information Engineering, Osaka University
SUGINO T.
Dept. of Electrical, Electronic and Information Engineering, Osaka University
Mazumder M.
Dept. Of Electrical Electronic And Information Engineering Osaka University
TOKUYAMA S.
Dept. of Electrical, Electronic and Information Engineering, Osaka University
WATANABE D.
Dept. of Electrical, Electronic and Information Engineering, Osaka University
Sugino T.
Department Of Electrical Electronic And Information Engineering Osaka University
Tokuyama S.
Dept. Of Electrical Electronic And Information Engineering Osaka University

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