Galvanic Corrosion Suppression of High-k/Metal Gates using Organic Solvent based HF
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概要
- 論文の詳細を見る
- 2007-09-19
著者
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Aoki H.
Department of Physics, Tohoku University
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HOTTA S.
Department of Metallurgy, Tohoku University
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Sugino T.
Department Of Electrical Electronic And Information Engineering Osaka University
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KIMURA C.
Department of Plastic and Reconstructive Surgery, Hokkaido University and Hakodate Chuo Hospital
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WATANABE D.
Department of Electrical Electronic and Information Engineering, Osaka University
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Hotta S.
Department Of Electrical Electronic And Information Engineering Osaka University
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