Ag diffusion in Low-K material (SiOC and BCN) and its challenges using as an interconnection

スポンサーリンク

概要

論文の詳細を見る
2006-09-13

著者

MAZUMDER M.
Dept. of Electrical, Electronic and Information Engineering, Osaka University
MORIYAMA R.
Dept. of Electrical, Electronic and Information Engineering, Osaka University
KIMURA C.
Dept. of Electrical, Electronic and Information Engineering, Osaka University
AOKI H.
Dept. of Electrical, Electronic and Information Engineering, Osaka University
SUGINO T.
Dept. of Electrical, Electronic and Information Engineering, Osaka University
Mazumder M.
Dept. Of Electrical Electronic And Information Engineering Osaka University
Sugino T.
Department Of Electrical Electronic And Information Engineering Osaka University
Moriyama R.
Dept. Of Electrical Electronic And Information Engineering Osaka University

関連論文

スポンサーリンク