Rate-Limiting Reaction of Layer-by-Layer Oxidation on Si(001) Surfaces : Dependence on the First Oxide Layer Growth Kinetics
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概要
- 論文の詳細を見る
- 2006-09-13
著者
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Takakuwa Yuji
Institute Of Multidisciplinary Research For Advanced Materials Tohoku University
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OGAWA Shuichi
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
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Ogawa Shuichi
Institute Of Multidisciplinary Research For Advanced Materials Tohoku University
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