Comparative Studies of Pore Seal Films for Porous-Silica / Cu Interconnect
スポンサーリンク
概要
- 論文の詳細を見る
- 2005-09-13
著者
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Kikkawa T.
Mirai Advanced Semiconductor Research Center National Institute Of Advanced Industrial Science And T
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Kohmura K.
Mirai Association Of Super-advanced Electronics Technologies (aset)
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SHISHIDA Y.
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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CHIKAKI S.
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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SHIMOYAMA M.
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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YAGI R.
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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YOSHINO T.
MIRAI, Advanced Semiconductor Research Center, National Institute of Advanced Industrial Science and
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ONO T.
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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ISHIKAWA A.
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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FUJII N.
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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NAKAYAMA T.
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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TANAKA H.
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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KAWAHARA J.
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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SONODA Y.
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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MATSUO H.
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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HISHIYA S.
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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YAMANISHI T.
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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KINOSHITA K.
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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Hishiya S.
Mirai Association Of Super-advanced Electronics Technologies (aset)
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Chikaki S.
Mirai Association Of Super-advanced Electronics Technologies (aset)
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Seino Y.
Mirai Association Of Super-advanced Electronics Technologies (aset)
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Shimoyama M.
Mirai Association Of Super-advanced Electronics Technologies (aset)
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Kawahara J.
Mirai Association Of Super-advanced Electronics Technologies (aset)
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Yamanishi T.
Mirai Association Of Super-advanced Electronics Technologies (aset)
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Yoshino T.
Mirai Advanced Semiconductor Research Center National Institute Of Advanced Industrial Science And Technology
関連論文
- Formation of Mesoporous Pure Silica Zeolite Film
- Comparative Studies of Pore Seal Films for Porous-Silica / Cu Interconnect
- Recovery of Process-induced Damages of Porous Silica Low-k Films by TMCTS Vapor Annealing
- Height Measurement Using High-Precision Atomic Force Microscope Scanner Combined with Laser Interferometers
- Characterization of Pore Size Distributions in Ultralow-k Films