Development of SGOI and sSOI for High Volume Manufacturing
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概要
- 論文の詳細を見る
- 2004-09-15
著者
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Cayrefourcq Ian
Soitec
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KENNARD Mark
SOITEC
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METRAL Frederic
SOITEC
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GHYSELEN Bruno
SOITEC
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MAZURE Carlos
SOITEC
関連論文
- Development of SGOI and sSOI for High Volume Manufacturing
- Delta-Doping of Epitaxial GaN Layers on Large Diameter Si(111) Substrates
- Strain State and Thermal Stability of Strained-Si-on-Insulator Substrates