Mobility Enhancement of MOSFETs on p-Silicon (111) with In-situ HF-Vapor Pre-Gate Oxide Cleaning

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概要

• 論文の詳細を見る
• 2004-09-15

著者

• Lin Y.

  Department Of Materials Science And Engineering National Chiao Tung University

• Yang W.

  Department Of Electronic Engineering Feng Chia University

• CHAO T.

  Department of Electrophysics, National Chiao Tung University

• Chao T.

  Department Of Electrophysics National Chiao Tung University

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