Emission and Sputtering Characteristics of Ne-Ar Mixed Gas Glow Discharge Plasmas
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概要
- 論文の詳細を見る
- 日本分析化学会の論文
- 2007-09-10
著者
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Wagatsuma Kazuaki
Institute For Materials Research Tohoku University
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PARK Hyunkook
Institute for Materials Research, Tohoku University
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TSUKIJI Machiko
Institute for Materials Research, Tohoku University
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LEE SangChun
Department of Chemistry and Chemical Engineering, Kyungnam University
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Lee Sangchun
Department Of Chemistry And Chemical Engineering Kyungnam University
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Park Hyunkook
Institute For Materials Research Tohoku University
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Tsukiji Machiko
Institute For Materials Research Tohoku University
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