The Displacement Measurement Device using a Comb-Drive Actuator

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概要

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• The displacement measurement device using a comb-drive actuator is described. The comb-drive actuator is driven in its mechanical resonance by the same manner as the crystal oscillator widely used in modern electronics. The key feature of our comb-drive actuator is to show the clear nonlinear mechanical immitance near its resonance, by which the comb-drive actuator can be vibrated using a simple positive feedback circuit. Since the self-oscillation frequency is changed when a probe formed with the comb-drive actuator contacts with an opposing object, displace mesurement like a stylus meter is possible by measuring the frequency. In our experiment, 0.23 μm step is succesfully measured using the self-oscillated comb-drive actuator.

• 社団法人 電気学会の論文
• 2007-03-01

著者

• Hashiguchi Gen

  Faculty Of Engineering Kagawa University

• Ayano Kenjiro

  Faculty Of Engineering Kagawa University

• SUZUKI Katsuyori

  Faculty of Engineering, Kagawa University

• Suzuki Katsuyori

  Faculty Of Engineering Kagawa University

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