New Technique for Fabrication of Individual Carbon-Nanotube Field Emitters

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Currently, field emission experiments on individual carbon nanotubes (CNTs) are carried out by placing the CNTs inside a transmission electron microscope. In this work we report an alternative method of fabricating and measuring individual multiwalled CNT-field emitters fabricated on a silicon substrate by the e-beam lithography technique. A field emission experiment is then performed in a high-vacuum system for CNTs with various radii, lengths, interelectrode separations and tip structures. The geometrical enhancement factors $\beta$ exhibit three ranges: low ($\beta\sim 10$), medium ($\beta\sim 100$) and high ($\beta>200$) depending on whether the CNT tip is closed-tipped, open-tipped with a flat end or open-tipped with an oblique-angle end, respectively. The turn-on voltage $V_{\text{to}}$ also depends on the tip structure and the lowest $V_{\text{to}}$ occurs in open-tipped-with-oblique-angle CNTs. The geometrical enhancement factor depends on the tube geometry via a linear equation $\beta=\beta_{0}(1+d/kr)$ with $k\approx 40$ and $\beta_{0}$ equals 163 and 53 for the high-$\beta$ and medium-$\beta$ lines, respectively, where $r$ is the radius and $d$ is the CNT tip-anode spacing. The new method may open a path leading to the integration of nanotube field emitters with other miniature devices using semiconductor integrating technology.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2007-01-15

New Technique for Fabrication of Individual Carbon-Nanotube Field Emitters

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