High Speed Surface Micro-Polishing for Spurious Reduction of Small Quartz Crystal Blanks

スポンサーリンク

概要

• 論文の詳細を見る

• Surface polishing is required for small crystal blanks to eliminate frequency spurious generated by the infinite rectangular shape. From the productivity viewpoint, bi-convex or plano-cylindrical surface are generally used to realize the energy trapping at the central part of the blanks. So far barrel polishing is the common fabrication technology to obtain bi-convex surface, however, the surface is finished insufficiently and fabrication process takes longer time as the blank size becomes small. To solve this difficulty, two types of new surface micro-polishing mechanisms with fixed abrasive and arrayed blank arrangement are experimentally examined to obtain plano-cylindrical surface. The fastest finishing time of 10 s for a blank is achieved together with the spurious elimination.

• 社団法人 電気学会の論文
• 2007-01-01

著者

• Yanagida Yasuko

  Precision&inteligence Laboratory Tokyo Institute Of Technology

• Yanagida Yasuko

  Precision And Intelligence Laboratory Tokyo Institute Of Technology

• HATSUZAWA Takeshi

  Precision and Intelligence Laboratory, Tokyo Institute of Technology

• HAMANO Hisashi

  Precision and Intelligence Laboratory, Tokyo Institute of Technology

• SAITO Masashi

  Precision and Intelligence Laboratory, Tokyo Institute of Technology

• Hatsuzawa Takeshi

  Precision And Intelligence Laboratory Tokyo Institute Of Technology

• Hamano Hisashi

  Precision And Intelligence Laboratory Tokyo Institute Of Technology

• Saito Masashi

  Precision And Intelligence Laboratory Tokyo Institute Of Technology

• Yanagida Yasuko

  Tokyo Inst. Of Technol. Yokohama

関連論文

• Electrically Modulated Cellular Biodevices
• 細胞の増殖,分化,遺伝子発現の電気刺激による制御
• High Speed Surface Micro-Polishing for Spurious Reduction of Small Quartz Crystal Blanks
• Fabrication of DEP Device for Cell Positioning and its Cell Viability Test
• On-Chip Single-Cell Lysis for Extracting Intracellular Material

スポンサーリンク