Orthogonality Correction of Planar Sample Scanner for Atomic Force Microscope

スポンサーリンク

概要

• 論文の詳細を見る

• A planar scanner of an atomic force microscope (AFM) can move samples to within a few nm of resolution. Tube piezoelectric actuators have coupling errors, that can be eliminated by software correction; however, residual errors can deteriorate the actual information in a small-feature sample. To obtain stable AFM images of small-feature samples, a closed-loop control cannot be used due to the large random errors of the sensor. The orthogonality of a new sample scanner having a motion guide is measured and corrected using a simple electronic circuit in open-loop scanning to reduce the scanner artifact.

• Japan Society of Applied Physicsの論文
• 2006-04-25

著者

• Gweon Dae-gab

  Department Of Mechanical Engineering Korea Advanced Institute Of Science And Technology

• Lee Dong-yeon

  Department Of Mechanical Engineering Korea Advanced Institute Of Science And Technology

• Lee Moo-Yeon

  Digital Appliances Laboratory, LG Electronics Corp., 222-22 Guro3-Dong, Guro-Gu, Seoul 152-848, Repu

• Lee Moo-yeon

  Digital Appliances Laboratory Lg Electronics Corp.

関連論文

• Orthogonality Correction of Planar Sample Scanner for Atomic Force Microscope
• Design and Evaluation of Two Dimensional Metrological Atomic Force Microscope using a Planar Nanoscanner

スポンサーリンク