Fabrication of Si/Al_2O_3/Si SOI Structures Grownf80by the UHV-CVD Method
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概要
- 論文の詳細を見る
- 1995-08-21
著者
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Kimura T.
Department of Cardiology Kokura Memorial Hospital
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ISHIDA M.
Department of Physics, Tokyo Institute of Technology
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Sengoku A.
Department Of Electrical And Electronic Engineering Toyohashi University Of Technology
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