Axial Profile of Charged Particles in Ar/CF_4 RF CCP Plasmas
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概要
- 論文の詳細を見る
- 2001-04-19
著者
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Kimura T.
Department of Cardiology Kokura Memorial Hospital
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Ohe K.
Department Of Systems Engineering Nagoya Institute Of Technology
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KAGA K.
Department of Systems Engineering, Nagoya Institute of Technology
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