Micro Systems by Bulk Silicon Micromachining

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概要

• 論文の詳細を見る
• 1996-08-26

著者

• Esashi Masayoshi

  Faculty Of Engineering Tohoku University

関連論文

• High Frequency Responses of YBa_2Cu_3O_ Josephson Junctions on Si Substrates Fabricated by Focused Electron Beam Irradiation
• Temperature Compensated Piezoresistor Fabricated by High Energy Ion Implantation
• Development of an Anti-Corrosive Integrated Mass Flow Controller
• Micro Systems by Bulk Silicon Micromachining
• Fabrication of Reactive Ion Etching Systems for Deep Silicon Machining (特集:マイクロマシン加工技術)

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