Development of an Anti-Corrosive Integrated Mass Flow Controller

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概要

• 論文の詳細を見る
• 電気学会の論文
• 2001-02-01

著者

• ESASHI Masayoshi

  Faculty of Engineering, Tohoku University

• Sim Dong-youn

  Faculty Of Engineering Tohoku University

• Esashi Masayoshi

  Faculty Of Engineering Tohoku University

• HIRATA Kaoru

  Faculty of Engineering, Tohoku University

• Hirata Kaoru

  Faculty Of Engineering Tohoku University

関連論文

• High Frequency Responses of YBa_2Cu_3O_ Josephson Junctions on Si Substrates Fabricated by Focused Electron Beam Irradiation
• Temperature Compensated Piezoresistor Fabricated by High Energy Ion Implantation
• Development of an Anti-Corrosive Integrated Mass Flow Controller
• Micro Systems by Bulk Silicon Micromachining
• Fabrication of Reactive Ion Etching Systems for Deep Silicon Machining (特集:マイクロマシン加工技術)

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