High Sensitive Formaldehyde Gas Sensor Prepared by R.F. Induction Plasma Deposition Method
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概要
- 論文の詳細を見る
The present work is concerned on developing high sensitive and high performance SnO2-based gas sensors for detecting indoor air pollutant formaldehyde gas. The film was deposited on an alumina substrate using R.F. Induction Plasma Deposition technique. Physical properties of sensing films were examined by SEM, XRD method. The sensors showed high sensitivity to typical HCHO gas at an extremely low gas concentration of 20 parts-per-billion (ppb) with quick response and recovery time at several minutes. The effect of the doping of various metallic additives on the gas-sensing properties and operating temperature dependency were also investigated in the work.
- 社団法人 電気学会の論文
- 2005-12-01
著者
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Katsube Teruaki
Faculty of Engineering, Saitama University
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Katsube Teruaki
Faculty Of Engineering Saitama University
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Shi Liqin
Faculty Of Engineering Saitama University
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Nakano Mamoru
Faculty Of Engineering Saitama University
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GAO Wei
Faculty of Engineering, Tohoku University
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Hasegawa Yuki
Faculty of Pharmacy, Meijo University
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NAKAMURA Kiyozumi
Faculty of Engineering, Saitama University
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Nakamura Kiyozumi
Faculty Of Engineering Saitama University
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Hasegawa Yuki
Faculty Of Engineering Saitama University
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Gao Wei
Faculty Of Engineering Saitama University
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Gao Wai
Faculty of Engineering, Saitama University
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