Decomposition of Halide Compounds by Nonequilibrium Discharge

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概要

• 論文の詳細を見る

• A narrow-gap silent discharge has been successfully applied to the resolution of halide compounds (CCl2F2 and CF4) diluted in mixed gases of H2O, O2, N2 and Ar with a varied composition at an atmospheric pressure. The optimum composition of the discharge gas is discussed in terms of an effective decomposition energy $E_{\text{d}}$ defined as the energy necessary for $e^{-1}$-fold reduction of the halide concentration. Efficient decomposition of CF4 gas is realized with the use of Ar gas as the dilution gas; the minimum value of $E_{\text{d}}$ approaches 760 eV/CF4-molecule, which must be compared with the value of 18 keV/CF4 obtained when N2 is used as the dilution gas.

• 応用物理学会の論文
• 2005-11-15

著者

• KITAMURA Akira

  Graduate School of Maritime Sciences, Kobe University

• Kurahashi Masato

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Wada Noboru

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Gotou Toyokazu

  Communication Systems Center, Mitsubishi Electric Corporation, 8-1-1 Tsukaguchi-honmachi, Amagasaki,

• Kuzumoto Masaki

  Advanced Technology R&D Center, Mitsubishi Electric Corporation, 8-1-1 Tsukaguchi-honmachi, Amagasak

• Gotou Toyokazu

  Communication Systems Center Mitsubishi Electric Corporation

• Kuzumoto Masaki

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Kitamura Akira

  Graduate School Of Science And Technology Kobe University

• Kitamura Akira

  Graduate School Of Engineering Tottori University

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