Behavior of Metal-Induced Negative Oxide Charges on the Surface of N-type Silicon Wafers Using Frequency-Dependent AC Surface Photovoltage Measurements
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-06-15
著者
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Ikeda Masanori
Department of Tumor Virology, Okayama University Graduate School of Medicine, Dentistry, and Pharmac
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SHIMIZU Hirofumi
Department of Urology,Teikyo University School of Medicine
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SHIN Ryuhei
Department of Electrical and Electronic Engineering, College of Engineering, Nihon University
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