A Simple Method to Fabricate Double-Gate SOI MOSFET with Diffusion Layer on Bulk Silicon Wafer as the Bottom Gate
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概要
- 論文の詳細を見る
- 2001-09-25
著者
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Zhang Shengdong
Institute Of Microelectronics Peking University
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Chan Mansun
The Hong Kong University Of Science And Technology
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Chan Mansun
Department Of Electrical And Electronic Engineering Hong Kong University Of Sci. & Tech.
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Ho Wai-hung
Department Of Microelectronics Fabrication Facility Hong Kong University Of Science & Technology
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LIN Xinnan
The Hong Kong University of Science and Technology
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LIN Xinnan
Department of Electrical and Electronic Engineering, Hong Kong University of Science & Technology
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FENG Chuguang
Department of Electrical and Electronic Engineering, Hong Kong University of Science & Technology
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ZHANG Shengdong
Department of Electrical and Electronic Engineering, Hong Kong University of Science & Technology
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Feng Chuguang
Department Of Electrical And Electronic Engineering Hong Kong University Of Science & Technology
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