Filling of Tungsten into Deep Trench Using Time-Modulation CVD Method

スポンサーリンク

概要

• 論文の詳細を見る
• 2001-09-25

著者

• Yamada Y.

  Dept. of Environmental Technology, Nagoya Institute of Technology

• NAKAMURA T.

  Dept.of Orthop.Surgery, Faculty of Medicine, Kyoto University

• IGARASHI Y.

  Dept.of Physics,Tohoku University

• Lee K.

  Dept. Of Machine Intelligence And System Engineering Tohoku University

• Park K.

  Dept. Of Hort. Sci. College Of Natural Resources Korea Univ.

• MOROOKA T.

  Dept. of Machine Intelligence and Systems Engineering, Tohoku University

• LEE K.

  JST(Japan Science and Technology Corporation)

• KURINO H.

  Dept. of Machine Intelligence and Systems Engineering, Tohoku University

• KOYANAGI M.

  Dept. of Machine Intelligence and Systems Engineering, Tohoku University

• Kurino H.

  Dept. Of Machine Intelligence And System Engineering Tohoku University

• Kurino H.

  Department Of Machine Intelligence And System Engineering Tohoku University

• Koyanagi M.

  Dept. Of Machine Intelligence And System Engineering Tohoku University

• Morooka T.

  Dept. Of Machine Intelligence And Systems Engineering Tohoku Univ.

• Koyanagi M.

  Dept. Biophys. Facl. Sci. Kyoto Univ.

• Park K.

  Dept. Of Machine Intelligence And System Engineering Tohoku University

• KOYANAGI M.

  Dept. of Machine Intelligence and Systems Engineering, Tohoku Univ.

関連論文

• Resonance Behavior in Ferrofluid with Oscillatory Shear Flow
• Tibial Polyethylene Micro-Wear Pattern Observed in Knee Simulator Specimens
• 6p-B-5 Cosmic-ray Test of the Installed Endcap RPC Modules in BELLE Detector
• Three-Dimensional Integration of Fully Depleted SOI Devices
• Filling of Tungsten into Deep Trench Using Time-Modulation CVD Method
• Deep Trench Etching in SOI Wafer for Three-Dimensional LSIs
• Development of the Three-Dimensional Integration Technology for Highly Parallel Image Processing Chip
• A New Wafer-Scale Chip-on-Chip (W-COC) Packaging Technology Using Adhesive Injection Method
• 44 Alpha fetoprotein determinations in the management of yolk sac tumors of the ovary.
• 2 Immunohistochemical study of c-myc and c-erbB-2 oncogene products in uterine cervical cancers.
• PLC ACTIVITY OF ISOLATED PLANARIAN OCELLI AND EFFECTS OF U73122 ON THE PHOTORECEPTOR CURRENT IN OCELLI(Physiology)(Proceeding of the Seventy-Third Annual Meeting of the Zoological Society of Japan)
• EXPRESSION AND CHARACTERIZATION OF LANCELET OPSIN(Physiology)(Proceeding of the Seventy-Third Annual Meeting of the Zoological Society of Japan)
• 30p-EC-13 Double Beta Decay Experiment at the Kamioka Underground Laboratory
• 317. Correlation between Vascular Sensitivity to Angiotensin II and Plasma Sex Steroid Hormone Levels before the Onset of Pregnancy-induced Hypertension
• EFFECT OF THE FILM PACKAGES, ANION CONCENTRATION AND PRE-TREATMENT ON THE QUALITIES OF BASIL IN MODIFIED ATMOSPHERE STORAGE
• 95 Studies on the experimental Chlamydia trachomatis salpingitis in rabbits.
• 352 Results of the pregnancy and parturition in mother with Chlamydia trachomatis antibodies.
• 437 Detection of IgM antibody against Chlamydia in newborns as an examination of Chlamydia trachomatis infection of the birth canal.
• New SOI Flash Memory with Side Channel and Side Floating Gate
• Ultra-Shallow Junotion Formation by AsH3 Adsorption Method
• New Three-Dimensional Wafer Bonding Technology Using Adhesive Injection Method
• High Speed and Low Voltage Operation of CMOS Inverters Using SOI-MOSFET with Body Terminal
• 348 Change of human papilloma virus (HPV) DNA copy number during the course of the treatment for genital condyloma.
• 434 Therapeutic effect of interferon alpha on human papilloma virus (HPV) infection of the cervix or vagina. : evaluation by histo-cytological and DNA hybridization study
• 119 Estrogen production in common epithelial tumors of the ovary.
• 12 Clinical and experimental study on postoperative adjuvant chemotherapy for cervical adenocarcinoma.
• 24. Viability of Cryopreserved Ovarian Tissues in Rats
• 27. Studies on Prevention the Small Volume Carcinoma of the Cervix from its Proliferation
• 14. Detection of Human Papillomavirus (HPV)-DNA in Lesions of the Uterine Cervix and Vulva
• 23 Effect of recombinant Granulocyte Stimulating Factor (rG-CSF) and recombinant Erythropoietin (rEPO) on the ploliferation of gynecological cultured tumor cells.
• DIVERSIFICATION OF CELL COMPARTMENT SPECIFIC GENES IN THE EARLY EVOLUTION OF EUKARYOTES
• 114 Effect of the surfactant like phospholipids in the tubal endothelial cell and their secretory products.
• 127 The Histologic Evaluation and Treatment of Occlusion of the Tubal Pars Interstitialis : Tubo Uterine Anastomosis
• 449 Early second look laparoscopy (ESLL) after conservative operations to prevent postoperative adhesions.
• 135. The Occasion of Interstitial Tubal Occlusions and its New Approaches in the Treatment
• 260.Analysis of Delay in Diagnosis of Adenocarcinoma of the Uterine Cervix : Review of Previous Cervical Smears and Clinicopathological Features in 14 Patients : XXXXIV Diagnosis and Examination(II)
• Influences of Ion Implantation Damages on Elevated Source/Drain Formation for Ultra-Thin Body SOI MOSFET
• A New Three-Dimensional Multiport Memory for Shared Memory in High Performance Parallel Processor System
• Three-Diensional Integration Technology Based on Wafer Bonding Technique Using Micro-Bumps
• Passive Optical Alignment with High Accuracy for Low-Loss Optical Interposer
• Novel Opto-Electro Printed Circuit Board with Polynorbornene Optical Waveguide
• 326. Effect of Increased Calcium Intake during Third Trimester on the Vascular Sensitivity to Angiotensin II
• 39. Effects of Highly Purified Eico-sapentaenoic Acid on Vascular Reactivity in the Rabbit
• 66. Clinical Evaluation of the Angiotensin Sensitivity Test in Pregnancy-induced Hypertension : Clinical Value of the False Positive Angiotensin Sensitivity Test
• 409. The Differences of Protein Kinase Activities and Calmodulin Level between Placental and Non-placental Regions of Pregnant Rabbit Myometrium
• 345.Platelet Parameters in Normal and Toxemic Pregnancy : XXXXXVIII Pregnancy, Labor and Puerperium(VIII)
• MOLECULAR ANALYSIS OF A PROTEIN IN THE EGG OF THE HERMATYPIC CORAL, FAVITES CHINENSIS(Biochemistry)(Proceedings of the Seventy-Third Annual Meeting of the Zoological Society of Japan)
• An Experimental Evaluation of a New Type of Fiber Post and Composite Resin Core System (i-TFC) using Bovine Teeth
• Internalization of membrane CEA of a human gastric adenocarcinoma cell line
• Changes of Maxillary Alveolar Profile Angle and Inclination of Insisor in Japan
• 28. Androgenesis as a Cause of Hydatidiform Mole
• DIAGNOSIS AND SURGICAL INDICATION CONCERNING ASYNERGY OF THE LEFT VENTRICULAR WALL : PROCEEDINGS OF THE 38TH ANNUAL MEETING OF THE JAPANESE CIRCULATION SOCIETY
• 175. Quick Safe Warming of Peritoneal Irrigation Solution, Infusion Solution and Blood
• PURIFICATION OF SPERM-ACTIVATING PROTEINS FROM UNFERTILIZED HERRING EGG. II.(Developmental Biology)Proceedings of the Sixty-Third Annual Meeting of the Zoologiacal Socistry of Japan
• Magnetic Critical Behavior of γ-Fe/Cu Multilayer
• 127. Microelectrophoretic Estrogen Effect on Unit Activity of the Rat Brain and Chemical Application under Microscopic Neuronal Observation
• 391. Monoclonal Antibodies to Choriocarcinoma
• 130. The Studies on HLA-class I and Class II Antigens Expression in Choriocarcinoma a Cell Lines by IFN-γ
• 114. The Cell Surface Antigens of Choriocarcinoma Cells Identified by Monoclonal Antibodies
• 194. Condyloma Accuminatum of the Vulva (Flat Type)
• 48. Significance of Prostanoid Synthesis in Feto-placental Compartment in Relation to Toxemic Pregnancy
• 347. A Study on the Intensification of Antitumor Activity in Cervical Carcinoma Patients by Preoperative Administration of a Biological Response Modifier (BRM)
• Relation between Kink Effect and Impact Ionization Effect in SOI MOSFETs with Body Terminal
• Polymide Waveguide as Optical Interconnection for multi-Chip Module Application
• 113. Activity of and Response to Interleukin 2 (IL-2) of Peripheral Blood Mononuclear Leukocytes (PBL) in Cervical Cancer
• 284.Localization of Lymphocyte Subpopulation in Human Uterine Cervical Cancer Used by Indirect Immunofluorescent Technique with Monoclonal Antibodies : XXXXVIII Malignant Tumor(VIII)
• 106.Suppressor Activity of Cord Blood T Cell Subsets through Dialysis Membrane : XVIII Immunology(III)
• 224. Studies on Specific Cell-mediated Cytotoxicity against Human Autologous Tumor (Cervical Cancer)
• Interface between Bioceramic and Bone ; Ultrastructure and Bone Formation
• REVERSIBILITY OF EXCYSTMENT IN A HYPOTRICH CILIATE, HISTRICULUS CAVICOLA : Cytology and Morphology
• 144. Medium for IVF-ET: Ultrafiltrated Fetal Serum for Fetal Cells
• 390. New Side Effect of Ferric Oxide Saccharated: Fanconi Syndrome Induced by Japan-specific Parenteral Iron Drug
• 179. Severe Cancer Pains Relieved by a Simple Portable Waterproof Microautoinjector
• 205. The Effect of Ultrasound on the Growth of Raji Cells and Chromosome Aberrations in Human Lymphoblasts

もっと見る 閉じる

スポンサーリンク