Fabrication of Focusing Grating Coupler Using e-Beam Lithographed Hydrogen Silsesquioxane
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概要
- 論文の詳細を見る
- 2005-05-15
著者
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Paek Mun
Basic Research Lab. Electronics And Telecommunications Research Institute
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Suh Dongwoo
Electronics And Telecommunications Research Institute Microelectronics Laboratory
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Park Yongwoo
Basic Research Laboratory Electronics And Telecommunication Research Institute
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RYU Hojun
Basic Research Lab., Electronics and Telecommunications Research Institute
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SUH Dongwoo
Basic Research Lab., Electronics and Telecommunications Research Institute
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KANG Kwangyong
Basic Research Lab., Electronics and Telecommunications Research Institute
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- Fabrication of Focusing Grating Coupler Using e-Beam Lithographed Hydrogen Silsesquioxane