Fabrication of Focusing Grating Coupler Using e-Beam Lithographed Hydrogen Silsesquioxane

概要

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A focusing waveguide grating coupler made of hydrogen silsesquioxane is fabricated successfully. The size of the focusing grating coupler is $1\,\text{mm}\times 1\,\text{mm}$ and the total device size is $8\,\text{mm}\times 2\,\text{mm}$. The numerical aperture and the minimum line width of the device are 0.85 and 85 nm, respectively. The spot size of this coupler is 335 nm for blue laser and the out-coupling efficiency is 25.7%.
INSTITUTE OF PURE AND APPLIED PHYSICSの論文
2005-05-15