Dual Damascene Simulation for Ionized Physical Vapor Deposition Process : Investigation on Incident Energy and Via Geometry Effects

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概要

• 論文の詳細を見る
• 2003-12-15

著者

• HWANG Chi-Chuan

  Department of Engineering Science, National Cheng Kung University

• CHANG Jee-Gong

  National Center for High-performance Computing

• Hwang Chi-chuan

  Department Of Engineering Science National Cheng Kung University

• Chang Jee-gong

  National Center For High-performance Computing National Applied Research Laboratories

• Hwang C‐c

  National Cheng Kung Univ. Tainan Twn

• Lu Jian-ming

  Department Of Engineering Science National Cheng Kung University:national Center For High-performanc

• Lin Hong-chang

  Department Of Engineering Science National Cheng Kung University

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• Dual Damascene Simulation for Ionized Physical Vapor Deposition Process : Investigation on Incident Energy and Via Geometry Effects(Condensed Matter : Structure, Mechanical and Thermal Properties)
• Dual Damascene Simulation for Ionized Physical Vapor Deposition Process : Investigation on Incident Energy and Via Geometry Effects
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