Optimum Incident Angle of Ar Cluster Ion Beam for Superhard Carbon Film Deposition
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-06-30
著者
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Yamada I
Dept. Of Communications & Integrated Systems Tokyo Institute Of Technology
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KITAGAWA Teruyuki
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
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MIYAUCHI Kazuya
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
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TSUBAKINO Harushige
Faculty of Engineering, Himeji Institute of Technology
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YAMADA Isao
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
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Yamada I
Univ. Hyogo Hyogo Jpn
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TOYODA Noriaki
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
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