Improved Resonance Characteristics by Thermal Annealing of W/SiO_2 Multi-Layers in Film Bulk Acoustic Wave Resonator Devices

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2004-04-15

著者

• Kim Dong-Hyun

  School of Electrical Engineering, Korea University

• Yim M

  School Of Engineering Information And Communications University (icu)

• YIM Munhyuk

  School of Engineering, Information and Communications University (ICU)

• CHAI Dongkyu

  School of Engineering, Information and Communications University (ICU)

• PARK Jin-Seok

  Hanyang University

• YOON Giwan

  School of Engineering, Information and Communications University (ICU)

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