Microroughness Reduction of Tungsten Films by Laser Polishing Technology with a Line Beam
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-04-15
著者
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Kim H‐j
Thin Film Material Research Center Korea Institute Of Science And Technology
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Lee Sungman
Laboratory For Quantum Optics Korea Atomic Energy Research Institute
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Kim D‐j
Hantech Co. Ltd.
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Kim Cheol-jung
Laboratory For Quantum Optics Korea Atomic Energy Research Institute
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Kim Hyun-jung
Hantech Co. Ltd.
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KIM Yong-Gi
Laboratory for Quantum Optics, Korea Atomic Energy Research Institute
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RYU Je-Kil
HANTECH Co., LTD.
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KIM Dae-Jin
HANTECH Co., LTD.
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CHA Byung
Laboratory for Quantum Optics, Korea Atomic Energy Research Institute
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CHA Hyungki
Laboratory for Quantum Optics, Korea Atomic Energy Research Institute
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Kim Yong-kee
Laboratory For Quantum Optics Korea Atomic Energy Research Institute
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