Chemical and Structural Stabilities of SiN_x Nano-Scale Islands Formed by Ionized N_2 Gas at Room Temperature

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2004-03-15

著者

• Jung Min-Cherl

  Department of Physics, University of Seoul

• Han Moonsup

  Department of Physics, University of Seoul

• Han Moonsup

  Department Of Physics University Of Seoul

• Jung Min-cherl

  Department Of Physics University Of Seoul

関連論文

• X-Ray Photoelectron Spectroscopy Study of Pt-Oxide Thin Films Deposited by Reactive Sputtering Using O_2/Ar Gas Mixtures
• Chemical and Structural Stabilities of SiN_x Nano-Scale Islands Formed by Ionized N_2 Gas at Room Temperature
• Photoluminescence and Electroluminescence Properties of The Er-doped Silicon-Rich Silicon Oxide Films deposited by Pulsed Laser Deposition Technique
• Chemical and Structural Stabilities of SiNx Nano-Scale Islands Formed by Ionized N2 Gas at Room Temperature

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