Defect Detection in Silicon Wafer by Photoacoustic Imaging

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概要

• 論文の詳細を見る

• Photoacoustic imagery is a non-destructive testing technique, which allows in-depth images in thick samples to be realized. Image representing cuts at different depths were obtained by modifying the laser source modulation frequency, and this technique was applied to defect localization within a silicon wafer.

• Japan Society of Applied Physicsの論文
• 2003-10-01

著者

• Franceschi Jean

  Laboratoire De Genie Electrique Universite Paul Sabatier

• BERQUEZ Laurent

  Laboratoire de Genie Electrique CNRS, Universite Paul Sabatier

• Marty-dessus Didier

  Laboratoire De Genie Electrique Cnrs Universite Paul Sabatier

• Marty-dessus Didier

  Laboratoire De Genie Electrique Universite Paul Sabatier

• Marty-Dessus Didier

  Laboratoire de Génie Electrique, Université Paul Sabatier, 118 Route de Narbonne, Toulouse 31062, France

関連論文

• Virtual Space Charge Model for a Frequency-Based Characterization of Insulators : Electrical Properties of Condensed Matter
• Defect Detection in Silicon Wafer by Photoacoustic Imaging
• A Comparison of Different Mathematical Treatments for Solving the Inverse Problem in Focused Laser Intensity Modulation Method

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