Figure Error Correction by Reflection Wavefront Control of Cu K_α Grazing Incidence Multilayer Mirrors

スポンサーリンク

概要

• 論文の詳細を見る
• 2003-10-01

著者

• YAMAMOTO Masaki

  Research Institute for Scientific Measurements, Tohoku University

• Majkova Eva

  Institute Of Physics Slovak Academy Of Sciences

• Yamamoto Masaki

  Research Center For Soft X-ray Microscopy Imram Tohoku University

• Yamamoto Masaki

  Research Center For Soft-x-ray Microscopy Institute Of Multidisciplinary Research For Advanced Mater

関連論文

• New Ellipsometric Approach to Critical Dimension Metrology Utilizing Form Birefringence Inherent in a Submicron Line-and-Space Pattern
• Correlation of Giant Magnetoresistance with Interfacial Roughness in Co/Cu Superlattices
• A Soft-X-Ray Imaging Microscope with a Multilayer-Coated Schwarzschild Objective : Imaging Tests
• Figure Error Correction by Reflection Wavefront Control of Cu K_α Grazing Incidence Multilayer Mirrors
• Grain Boundary Effect on Charge Transport in Pentacene Thin Films
• Consistency of the Surface Roughness Determined from Soft-X-Ray Reflectance and Surface Profiles Measured Using a Scanning Tunnelling Microscope : Coherence Length of the Soft X-Rays
• Optimal Design of Multilayer Mirrors for Water-Window Microscope Optics
• Analytical Designing of Two-Aspherical-Mirror Anastigmats Permitting Practical Misalignments in a Soft-X-Ray Optics

スポンサーリンク