3次元型光スイッチ用2軸櫛歯電極型 MEMS ミラーアレー

概要

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We present a new architecture of a 2-axis comb-driven micromirror array that combines a large deflection angle in a stationary operation, a low drive voltage, and easy scalability for a 3D MEMS optical switch. By using an SOI wafer with 100-mm thick top and bottom Si layers and a 1-mm buried oxide layer and, bulk micromachining with DRIE, we fabricated a 2-axis comb-driven micromirror array with a V-shaped torsion bar and comb teeth. To implement a 2-axis tilt motion, we fabricated a gold bump for creating a gap under the comb teeth on the electrode substrate and mounted the mirror array substrate onto the electrode substrate by using the flip-chip-transfer technique. We fabricated an 80 x 80 switch chip and achieved a +/-5 degree rotation of the 2-axis stationary operation with a 60-V drive voltage.
社団法人電気学会の論文
2003-10-01