Influence of Cu-decoration to Individual Crystal Originated Pits on Si Wafer
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-07-15
著者
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Shin Ji-shik
Atomic-scale Surface Science Research Center And Institute Of Physics And Applied Physics Yonsei Uni
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LYO In-Whan
Atomic-scale Surface Science Research Center, and Institute of Physics and Applied Physics, Yonsei U
関連論文
- Influence of Cu-decoration to Individual Crystal Originated Pits on Si Wafer
- Influence of Cu-decoration to Individual Crystal Originated Pits on Si Wafer