Profilometry of Sloped Plane Surfaces by Wavelength Scanning Interferometry
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概要
- 論文の詳細を見る
- 2002-06-01
著者
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YAMAMOTO Akihiro
Optical Engineering Laboratory, The Institute of Physical and Chemical Research (RIKEN)
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Yamaguchi I
Optical Engineering Laboratory Riken (the Institute Of Physical And Chemical Research)
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Yamamoto A
Optical Engineering Laboratory Riken (the Institute Of Physical And Chemical Research)
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Yamaguchi Ichirou
Optical Engineering Laboratory Institute Of Physical And Chemical Research (riken)
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Yamamoto Akihiro
Optical Engineering Laboratory Riken (the Institute Of Physical And Chemical Research)
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- Real-Time Measurement of In-Plane Translation and Tilt by Electronic Speckle Correlation
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