Characteristics of Nucleation Using the Bias-Enhanced Nucleation Method at Low Pressure

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概要

著者

OGI Sukeomi
Department of Electrical Engineering, Faculty of Engineering, Kyushu University
KUDO Kouichi
Department of Electrical Engineering, Fukuoka Institute of Technology
TOYOFUKU Masaharu
Department of Electrical Engineering, Fukuoka Institute of Technology
AOKI Kousuke
Department of Electrical Engineering, Fukuoka Institute of Technology

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