The Loss Kinetics of Substitutionsl Carbon in Si_<1-x>C_x Regrown by Solid Phase Epitaxy
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-02-01
著者
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Song J
Tohoku Univ. Sendai Jpn
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Kim Y
School Of Materials Science And Engineering Seoul National University
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KIM Tae-Kyung
School of Material Science and Engineering, Seoul-National University
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Kim Tae-joon
Cae Team Semiconductor R&d Center Samsung Electronics
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KIM Yong
School of Materials Science and Engineering, Seoul National University
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KIM Tae-Joon
School of Materials Science and Engineering, Seoul National University
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PARK Byungwoo
Korea Institute of Science and Technology
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SONG Jong
Korea Institute of Science and Technology
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Kim Tae-joon
School Of Materials Science And Engineering Seoul National University
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Kim Yong
School Of Information And Communications Gwangju Institute Of Science And Technology (gist)
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Kim Tae-Kyung
School of Material Science and Engineering, Seoul National University Seoul 151-742, Korea
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- The Loss Kinetics of Substitutional Carbon in Si1-xCx Regrown by Solid Phase Epitaxy
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