Improvement of Friction and Wear Performance of Titanium Nitride Films by Chlorine Ion Implantation
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概要
- 論文の詳細を見る
- Japan Institute of Metalsの論文
- 1999-12-01
著者
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Mitsuo Atsushi
Surface Technology Group R&d Tokyo Metropolitan Industrial Technology Research Institute
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Aizawa Tatsuhiko
Department Of Materials Science And Engineering University Of Toronto
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Aizawa Tatsuhiko
Department Of Metallury Graduate School Of Engineering University Of Tokyo
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- Improvement of Friction and Wear Performance of Titanium Nitride Films by Chlorine Ion Implantation