A thermal micro pressure sensor: its characteristics and application to pressure measurement in a minute package

概要

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A thermal micro pressure sensor suitable for measurement in the range of 7×10-3 to 1×105Pa was realized by forming a titanium (Ti) thin-film resistor on a floating NSG (non-doped silica glass) membrane, with the sensing area being as small as 60μm×60μm. The sensor performance was raised by increasing the gaseous ratio to the total thermal conduction, compensating the effect of ambient-temperature drift, and utilizing an optimized novel constant-bias Wheatstone bridge circuit. The sensor was successfully applied to monitoring the pressure in a sealed minute metal package with a capacity of about 0.5ml.
社団法人電気学会の論文
2001-02-01