Evaluation of the Electric Field above a Specimen Surface during SIMS Analysis

スポンサーリンク

概要

• 論文の詳細を見る
• Japan Society for Analytical Chemistryの論文
• 2000-05-10

著者

• Enda Toshiyuki

  Toshiba Corporation Semiconductor Company Ulsi Device Engineering Laboratory

• YAMAZAKI Hideyuki

  Toshiba Corporation, Research and Development Center

• Yamazaki Hideyuki

  Toshiba Corporation Research And Development Center

関連論文

• Evaluation of the Electric Field above a Specimen Surface during SIMS Analysis
• Quantitative Depth Profiling of Argon in Tungsten Films by Secondary Ion Mass Spectrometry
• Quantitative Secondary Ion Mass Spectrometry Analysis of Carbon and Fluorine Impurities on Silicon Wafers Stored in Polymer Carrier Cases

スポンサーリンク