Volt Ampere Characteristics of Low Current DC Discharges in Ar, H_2, CH_4 and SF_6

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概要

• 論文の詳細を見る
• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 1997-07-01

著者

• Petrovic Z

  Keio Univ. Yokohama Jpn

• PETROVIC Zoran

  Institute of Physics, University of Belgrade

• Petrovic Zoran

  Institute Of Physics University Of Belgrade

• STEFANOVIC Ilija

  Institute of Physics, University of Belgrade

関連論文

• Robot Assisted Optical Emission Tomography in an Inductively Coupled Plasma Reactor
• Influence of Ar Metastable on the Discharge Structure in Ar and N_2 Mixture in RF Discharges at 13.56 MHz ( Plasma Processing)
• Drift Velocities of Electrons in Time Varying Electric Fields
• Volt Ampere Characteristics of Low Current DC Discharges in Ar, H_2, CH_4 and SF_6
• Transport Parameters for Electrons in Carbon Monoxide
• The Radical Transport in the Narrow-Gap-Reactive-Ion Etcher in SF_6 by the Relaxation Continuum Model
• Volt Ampere Characteristics of Low Current DC Discharges in Ar, H 2, CH 4 and SF 6

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