Modulated pitch phase grating for optical encoder independent of the air gap

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概要

• 論文の詳細を見る
• 1996-03-01

著者

• Ieki A.

  Okuma Go. Ltd.

• Hane K.

  Department Of Mechatronics And Precision Engineering Tohoku Universit

• POSADA P.

  Department of Mechatronics and Precision Engineering, Tohoku University

• MATSUI K.

  Okuma Go. Ltd.

• NASHIKI M.

  Okuma Go. Ltd.

• Posada P.

  Department Of Mechatronics And Precision Engineering Tohoku University

関連論文

• MCH-12 Monolithically integration of GaN light-emitting diode and Si substrate with AlN/GaN superlattice as interlayer(Micro/Nanomechatronics IV,Technical Program of Oral Presentations)
• OD-02 DEVELOPMENT OF GRATING-IMAGE TYPE MICRO-ENCODER BY Si MICROMACHINING : IMPROVEMENT OF INTEGRATION AND ZERO-POINT DETECTION
• Modulated pitch phase grating for optical encoder independent of the air gap

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