酸化させたインバー材の昇温脱離法によるガス放出特性

概要

論文の詳細を見る
The outgassing characteristics of Invar samples oxidized in atmosphere at 600°C was measured by thermal desorption spectroscopy (TDS). The Outgassing rate of the oxidized Invar samples was three times larger than that of as-received Invar samples. After outgassing by heating in vacuum, no significant difference was found in the adsorption rates in atmosphere between the oxidized and as-received Invar samples. Once the samples were heated in vacuum, the length of exposure in atmosphere had little influence on the adsorption rates.
日本真空協会の論文
1998-03-20