アルゴンイオン衝撃した接合面の反射高速電子線回折観察

概要

論文の詳細を見る
The effect of argon ion bombardment on single crystal and polycrystalline copper surfaces were investigated using the reflection high energy electron diffraction (RHEED) and Auger electron spectroscopy techniques.<BR>This study shows that an increase of time and accelerating voltage of ion bombardment results in much surface damage both increasing the surface roughness and crystal disorder, due to ions penetrating the surface and displacing atoms. This surface damage depends on the incidence ion beam directin on to copper surface. The cross sectin of collision at incidence ion beam directin at <111>, the surface after ion bombardment at the incidence beam directin of <101> is smoother than at <111>. When speciments treated by ion bombardment are heated, argon gas is released. Heat treatment of specimens treated by ion bombardment is effective in restoring the surface to more perfect order.
日本真空協会の論文
1996-05-20