スポンサーリンク
University of Hyogo, Kamigori, Hyogo 678-1205, Japan | 論文
- Deposition Yield and Physical Properties of Carbon Films Deposited by Focused-Ion-Beam Chemical Vapor Deposition
- Aerial Image Mask Inspection System for Extreme Ultraviolet Lithography
- Direct Patterning on Sol–Gel Low-$k$ Porous Silica by Thermal Nanoimprinting
- Mechanical Characteristics of Nanosprings Fabricated by Focused-Ion-Beam Chemical Vapor Deposition Using Ferrocene Source Gas