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The Fraunhofer Institut Fur Integrierte Schaltungen Bauelementetechologie | 論文
- Microprobe Analysis of Pt Films Deposited by Beam Induced Reaction
- Microanalysis of Impurity Contamination in Masklessly Etched Area Using Focused Ion Beam
- Electron-Beam-Induced Deposition of Pt for Field Emitter Arrays
- A Computationally Efficient Method for Three-Dimensional Simulation of Ion Implantation (Special lssue on SISPAD'99)