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Micro and Nanotechnology Laboratory and Department of Electrical and Computer Engineering, University of Illinois at Urbana Champaign, 208 N. Wright St., Urbana, IL 61801, U.S.A. | 論文
- High-Rate Dry Etching of ZnO in BCl3/CH4/H2 Plasmas
- Micro-Racetrack Notch Filters Based on InGaAsP/InP High Mesa Optical Waveguides
- Application of the Ag-Based Ohmic Contact to the Realization of Thermally-Stable InAlAs/InGaAs/InP High Electron Mobility Transistors