スポンサーリンク
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816, Japan | 論文
- Production of Inductively Coupled RF Plasma Using a Ladder-Shaped Antenne
- Propagating Wave Characteristics for Plasma Production in Plasma Processing Field
- Parameters Measurement of ECR Silane Plasma
- Production of Inductively Coupled RF Plasma Using a Ladder-Shaped Antenna